用时域有限差分法分析平面光波导中深刻蚀沟槽

Jun Wang, Mingyu Li, Jian-jun He
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引用次数: 3

摘要

提出了一种模拟平面光波导中深蚀刻沟槽结构的时域有限差分(FDTD)方法。比较了时域有限差分法和传输矩阵法的数值结果。分析了侧壁垂直度的影响。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Analysis of deep etched trench in planar optical waveguide by FDTD method
A finite-difference time-domain (FDTD) method is presented for simulating deep etched trench structures in planar optical waveguides. Numerical results obtained from FDTD simulations and from the transfer matrix method (TMM) are compared. The effect of sidewall verticality is analyzed.
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