{"title":"压电薄膜的纳米级能量产生特性","authors":"M. Bhaskaran, S. Sriram, S. Ruffell, A. Mitchell","doi":"10.1109/COMMAD.2010.5699710","DOIUrl":null,"url":null,"abstract":"The use of nanoindentation to characterize in situ the voltage and current generation of piezoelectric thin films is reported for the first time. Continuous thin films and lithographically patterned nanoislands with limited interaction area have been characterised. The influence of size on energy generation parameters is reported, with the demonstration that nanoislands can exhibit more effective current generation.","PeriodicalId":129653,"journal":{"name":"2010 Conference on Optoelectronic and Microelectronic Materials and Devices","volume":"40 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2010-12-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Nanoscale energy generation characteristics of piezoelectric thin films\",\"authors\":\"M. Bhaskaran, S. Sriram, S. Ruffell, A. Mitchell\",\"doi\":\"10.1109/COMMAD.2010.5699710\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"The use of nanoindentation to characterize in situ the voltage and current generation of piezoelectric thin films is reported for the first time. Continuous thin films and lithographically patterned nanoislands with limited interaction area have been characterised. The influence of size on energy generation parameters is reported, with the demonstration that nanoislands can exhibit more effective current generation.\",\"PeriodicalId\":129653,\"journal\":{\"name\":\"2010 Conference on Optoelectronic and Microelectronic Materials and Devices\",\"volume\":\"40 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2010-12-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2010 Conference on Optoelectronic and Microelectronic Materials and Devices\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/COMMAD.2010.5699710\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2010 Conference on Optoelectronic and Microelectronic Materials and Devices","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/COMMAD.2010.5699710","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Nanoscale energy generation characteristics of piezoelectric thin films
The use of nanoindentation to characterize in situ the voltage and current generation of piezoelectric thin films is reported for the first time. Continuous thin films and lithographically patterned nanoislands with limited interaction area have been characterised. The influence of size on energy generation parameters is reported, with the demonstration that nanoislands can exhibit more effective current generation.
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