一种用于大位移范围磁场控制装置的微驱动器

The 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems Pub Date : 2013-04-07 DOI:10.1109/NEMS.2013.6559785

Kun Liu, Yitong Cao, Huaiqiang Yu, Zhihong Li

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引用次数: 1

摘要

为了满足低功耗和远程控制系统的要求，设计和制造了一种大倾角、零静态功耗的微执行器。推导了旋转作动器的解析模型和制作工艺流程，并对其静态性能进行了测试，并与理论数据进行了比较。结果表明，静电驱动装置的性能与理论预测模型吻合较好。

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A microactuator for magnetic field control device with large shifting range

A large tilting angle and zero static power consumption microactuator has been designed and fabricated in order to meet the requirement of low power consumption and remotely control systems. Analytical model and fabrication process flow of rotation actuator have been demonstrated, and static performance has been tested and compared to theoretical data. The results show the performance of our electrostatic driven device in good agreement with theoretical predicted model.

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The 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems

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