一种用于超大规模集成电路制造的工作单元制造系统

Proceedings of 15th IEEE/CHMT International Electronic Manufacturing Technology Symposium Pub Date : 1993-10-04 DOI:10.1109/IEMT.1993.398202

Ruey-Shan Guo, Mike, Ralph, Ken Holman, Fairchild Reseaxch

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引用次数: 8

摘要

介绍了下一代工作单元半导体制造系统背后的概念，该系统能够在产品质量、品种、成本和上市时间方面取得竞争优势。新系统与模块化的工作单元是针对高产品品种和精益生产。这与传统的以低产品种类和大规模生产为目标的作业车间系统形成了鲜明对比。在新的工作单元系统中，每个单元由执行多种连续功能的不同类型的机器组成。它通过将操作分解为平行线来增加灵活性，并通过以最小的缓冲区以小批量移动晶圆来简化生产流程。其他问题，如操作流程控制、设备选择和以人为本的改进，在新系统中得到解决。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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A work cell manufacturing system for VLSI fabrication

The concepts behind the next-generation work cell semiconductor manufacturing system capable of achieving competitive advantages in product quality, variety, cost, and time to market are presented. The new system with modular work cells is targeted at high product variety and lean production. This contrasts with the traditional job shop system targeted at low product variety and mass production. In the new work cell system, each cell consists of different types of machines performing multiple and consecutive functions. It increases flexibility by decomposing operations into parallel lines, and streamlines the production flow by moving wafers in small lot sizes with minimum buffers. Other issues such as operational flow control, equipment selections, and people-centered improvement in the new system are addressed.<>

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来源期刊

Proceedings of 15th IEEE/CHMT International Electronic Manufacturing Technology Symposium

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