静电MEMS致动器建模

2021 28th IEEE International Conference on Electronics, Circuits, and Systems (ICECS) Pub Date : 2021-11-28 DOI:10.1109/icecs53924.2021.9665561

Z. Kolka, V. Biolková, D. Biolek, Zdeněk Biolek

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引用次数: 4

摘要

本文讨论了静电微机电系统(MEMS)致动器及其相关机械系统的数学模型。该模型模拟了商用mems驱动微镜的行为。结果表明，静电梳状传动的电口可以正确地建模为一个通用的记忆电容器，其状态方程描述了配合的机械子系统的动态行为。分析了与此类MEMS相关的所谓窄带频率相关磁滞。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Modeling Electrostatic MEMS Actuator

The paper deals with a mathematical model of electrostatic MEMS (Micro-Electro-Mechanical Systems) actuator with an associated mechanical system. The model mimics the behavior of a commercial MEMS-driven micromirror. It is shown that the electric port of the electrostatic comb drive can be correctly modeled as a generic memcapacitor whose state equation describes the dynamic behavior of the cooperating mechanical subsystem. The so-called narrow-band frequency-dependent hysteresis, associated with such types of MEMS, is analyzed.

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来源期刊

2021 28th IEEE International Conference on Electronics, Circuits, and Systems (ICECS)

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