CGS薄膜在三段沉积过程中的结构演变

H. Al-Thani, F. Hasoon
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引用次数: 0

摘要

采用物理气相沉积(PVD)三段式工艺在钼包覆钠石灰玻璃(Mo/SLG)衬底上沉积了CGS薄膜。为了研究CGS生长过程的演变和Na在SLG衬底CGS薄膜中的外扩散,通过在生长过程中发生的多次放热反应来跟踪CGS薄膜的结构相变。采用θ/2θ x射线衍射表征技术对CGS薄膜的结构进行了表征,并对薄膜的生长相进行了表征。利用二次离子质谱法(SIMS)对CGS/Mo/SLG薄膜中的Na进行了深度表征。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
The structural evolution of CGS thin film during three-stage deposition process
CGS thin films were deposited on Molybdenum coated soda lime glass (Mo/SLG) substrates, using physical vapor deposition (PVD) 3-stage process. In order to study the evolution of the CGS growth process and the Na out-diffusion in the CGS films from SLG substrates, the structural phase transitions were traced in the CGS films indicated by multiple exothermic reactions that occur during the growth process. The CGS films' structure was examined and the films' growth phase was identified by applying θ/2θ X-Ray Diffraction characterization technique. Secondary-ion mass spectrometry (SIMS) was also applied to depth profile the Na in the CGS/Mo/SLG films.
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