稀土掺杂富硅SiOx的亮绿色可见电致发光

3rd IEEE International Conference on Group IV Photonics, 2006. Pub Date : 2006-10-09 DOI:10.1109/GROUP4.2006.1708218

T. MacElwee, S. Hill, S. Campbell, D. Ducharme, B.A. Ruoux, I. Calder, M. Flynn, J. Wójcik, S. Gujrathi, P. Mascher

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引用次数: 3

摘要

通过ECR-PECVD沉积富硅氧化硅，并掺杂Er或Tb，加工成器件结构。电测量用于表征传导机制，而光谱电致发光提供了亮度和机制的信息

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Bright Green Visible Electroluminescence from Rare Earth Doped Silicon Rich SiOx

Silicon rich silicon oxide was deposited by ECR-PECVD, doped with Er or Tb, and processed into device structures. Electrical measurements were used to characterize conduction mechanisms while spectroscopic electroluminescence provided information on brightness and mechanisms

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3rd IEEE International Conference on Group IV Photonics, 2006.

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