{"title":"符合SEMI标准的FA联网控制软件的设计与实现","authors":"N. Jin, Aidong Xu, Mingzhe Liu, Chenxi Wang","doi":"10.1145/3290420.3290468","DOIUrl":null,"url":null,"abstract":"As the complexity of the semiconductor process becomes more and more complex. The types and functions of production equipment involved in the semiconductor industry are also increasing. This paper studies and analyzes SEMI E5, E37, E30, E39, E40, E94, E87, E90, E84 and other related standards. Design and develop networked control software for equipment and plant automation (FA) system according to SEMI international standards.","PeriodicalId":259201,"journal":{"name":"International Conference on Critical Infrastructure Protection","volume":"55 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2018-11-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Design and implementation of FA networking control software that accords with SEMI standards\",\"authors\":\"N. Jin, Aidong Xu, Mingzhe Liu, Chenxi Wang\",\"doi\":\"10.1145/3290420.3290468\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"As the complexity of the semiconductor process becomes more and more complex. The types and functions of production equipment involved in the semiconductor industry are also increasing. This paper studies and analyzes SEMI E5, E37, E30, E39, E40, E94, E87, E90, E84 and other related standards. Design and develop networked control software for equipment and plant automation (FA) system according to SEMI international standards.\",\"PeriodicalId\":259201,\"journal\":{\"name\":\"International Conference on Critical Infrastructure Protection\",\"volume\":\"55 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2018-11-02\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"International Conference on Critical Infrastructure Protection\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1145/3290420.3290468\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"International Conference on Critical Infrastructure Protection","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1145/3290420.3290468","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Design and implementation of FA networking control software that accords with SEMI standards
As the complexity of the semiconductor process becomes more and more complex. The types and functions of production equipment involved in the semiconductor industry are also increasing. This paper studies and analyzes SEMI E5, E37, E30, E39, E40, E94, E87, E90, E84 and other related standards. Design and develop networked control software for equipment and plant automation (FA) system according to SEMI international standards.
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