脉冲激光技术在低电阻线间连接中的实验研究

2005 Quantum Electronics and Laser Science Conference Pub Date : 2005-05-22 DOI:10.1109/QELS.2005.1549208

K. Chung, J. Bernstein, J. Luo, J. A. Tuchman, Z. Ma

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引用次数: 0

摘要

本文对新型四线连接结构的设计进行了试验研究。从实验结果中得到了链路阻力最小、产率最高的能量窗口和最佳光斑尺寸。根据上述标准，将估计出最佳结构

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Experimental Study for Low Resistance Interline Connections Using Pulsed Laser Techniques

In this paper, experimental study was performed to evaluate the design of new four interline connect structures. The energy windows as well as optimal laser spot size were obtained from the experimental results, which show the minimum link resistance and highest yield. Accordingly above criteria, a best structure would be estimated

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2005 Quantum Electronics and Laser Science Conference

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