先进的传感器和执行器及其与微机电系统的结合

ISIE'2000. Proceedings of the 2000 IEEE International Symposium on Industrial Electronics (Cat. No.00TH8543) Pub Date : 2000-12-04 DOI:10.1109/ISIE.2000.930355

J. Nosek

{"title":"先进的传感器和执行器及其与微机电系统的结合","authors":"J. Nosek","doi":"10.1109/ISIE.2000.930355","DOIUrl":null,"url":null,"abstract":"The paper deals with material properties of piezoelectric relaxer based single crystals 0.91Pb(Zn/sub 1/3/Nb/sub 2/3/)-0.09PbTiO/sub 3/ (PZN-PT), which are important for application in actuators and sensors. The electromechanical coupling coefficient k/sub 33/, elastic coefficient s/sub 33//sup D/ and piezoelectric coefficient d/sub 33/ are determined using dynamic (resonant) and static methods of measurement. Strain vs. electric field characteristic with low hysteresis was observed for this single crystal. Design of an actuator of small displacements is presented. The integration possibilities of electromechanical elements into a high degree integration density (VLSI) circuits and creation of the micro-electromechanical systems (MEMS) are mentioned. The VLSI circuits are designed as digital ASIC circuits using CADENCE software.","PeriodicalId":298625,"journal":{"name":"ISIE'2000. Proceedings of the 2000 IEEE International Symposium on Industrial Electronics (Cat. No.00TH8543)","volume":"20 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2000-12-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"2","resultStr":"{\"title\":\"Advanced sensors and actuators and their incorporation into micro electromechanical systems\",\"authors\":\"J. Nosek\",\"doi\":\"10.1109/ISIE.2000.930355\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"The paper deals with material properties of piezoelectric relaxer based single crystals 0.91Pb(Zn/sub 1/3/Nb/sub 2/3/)-0.09PbTiO/sub 3/ (PZN-PT), which are important for application in actuators and sensors. The electromechanical coupling coefficient k/sub 33/, elastic coefficient s/sub 33//sup D/ and piezoelectric coefficient d/sub 33/ are determined using dynamic (resonant) and static methods of measurement. Strain vs. electric field characteristic with low hysteresis was observed for this single crystal. Design of an actuator of small displacements is presented. The integration possibilities of electromechanical elements into a high degree integration density (VLSI) circuits and creation of the micro-electromechanical systems (MEMS) are mentioned. The VLSI circuits are designed as digital ASIC circuits using CADENCE software.\",\"PeriodicalId\":298625,\"journal\":{\"name\":\"ISIE'2000. Proceedings of the 2000 IEEE International Symposium on Industrial Electronics (Cat. No.00TH8543)\",\"volume\":\"20 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2000-12-04\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"2\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"ISIE'2000. Proceedings of the 2000 IEEE International Symposium on Industrial Electronics (Cat. No.00TH8543)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/ISIE.2000.930355\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"ISIE'2000. Proceedings of the 2000 IEEE International Symposium on Industrial Electronics (Cat. No.00TH8543)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ISIE.2000.930355","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}

引用次数: 2

摘要

本文研究了0.91Pb(Zn/sub 1/3/Nb/sub 2/3/)-0.09PbTiO/sub 3/ (PZN-PT)压电弛豫单晶材料的性能，该材料在执行器和传感器中的应用具有重要意义。机电耦合系数k/sub 33/、弹性系数s/sub 33//sup D/和压电系数D/ sub 33/分别采用动态(谐振)和静态测量方法确定。观察到该单晶具有低迟滞的应变-电场特性。介绍了一种小位移作动器的设计。提出了机电元件集成到高度集成密度(VLSI)电路中的可能性以及微机电系统(MEMS)的创建。利用CADENCE软件将VLSI电路设计成数字ASIC电路。

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Advanced sensors and actuators and their incorporation into micro electromechanical systems

The paper deals with material properties of piezoelectric relaxer based single crystals 0.91Pb(Zn/sub 1/3/Nb/sub 2/3/)-0.09PbTiO/sub 3/ (PZN-PT), which are important for application in actuators and sensors. The electromechanical coupling coefficient k/sub 33/, elastic coefficient s/sub 33//sup D/ and piezoelectric coefficient d/sub 33/ are determined using dynamic (resonant) and static methods of measurement. Strain vs. electric field characteristic with low hysteresis was observed for this single crystal. Design of an actuator of small displacements is presented. The integration possibilities of electromechanical elements into a high degree integration density (VLSI) circuits and creation of the micro-electromechanical systems (MEMS) are mentioned. The VLSI circuits are designed as digital ASIC circuits using CADENCE software.

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ISIE'2000. Proceedings of the 2000 IEEE International Symposium on Industrial Electronics (Cat. No.00TH8543)

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