新系列的光驱动驱动装置

P. Meneroud, J. Gauthier, S. Duc, M. Thomachot, F. Claeyssen
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引用次数: 0

摘要

近年来在新型等离子体光电可移动薄膜的制造方面取得的进展为光致动器和器件提供了创新的解决方案。事实上,由于这种薄膜能够将光转换成几毫米的位移,因此可以被吸收为换能器。通过调整入射光参数(波长,曝光时间…),可以控制光电薄膜的驱动,以满足许多要求高位移和低力的应用。在这些方面,光电可移动薄膜的行为在其集成到更复杂的设备之前被表征。然后,这些设备的几个概念验证被制造出来,试图为市场带来新的功能,如光驱动光开关、光学微阀和偏转器:光开关通过消除图像传感器中产生噪声的暗电流,在电绝缘方面具有有趣的特性。它还利用光电可移动薄膜的大行程来实现与发射极电压的标准电绝缘距离。光驱动微阀/微泵适用于输送少量高精度流体,例如在医疗设备中。使用这种技术,当光从开到关(或相反)时,流体电路可以打开和关闭,而无需嵌入电力。光学偏转器广泛用于光学指向应用,其中快速响应和/或高精度是至关重要的。对光电可移动薄膜行为的适当理解能够在大角度范围内控制光束偏转的方向。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
New range of light driven actuation devices
The recent progresses made in the manufacturing of new plasmonic photomobile films are offering innovative solutions for light induced motion actuators and devices. Indeed, such films can be assimilated as transducers thanks to their ability to convert light into displacement with strokes up to several millimeters. By adjusting the incident light parameters (wavelength, exposure time…) the photomobile films actuation can be controlled to answer many applications requesting high displacements and low forces. In these regards, the behaviour of the photomobile films were characterized prior to their integration in more complex devices. Then, several proof-of-concepts of these devices were manufactured to try to bring new functionalities to the market such as light driven optical switch, optical micro-valve, and deflector: The optical switch features interesting properties in term of electrical insulation by eliminating the dark currents responsible for noise in image sensors. It also exploits the large stroke of the photomobile films to achieve the standard electrical insulation distance versus emitter voltage. Light driven micro-valves/micro-pumps are suitable for delivering a small quantity of fluids with high precision for example in medical devices. Using this technology, a fluid circuit can be opened and closed when light is switched from on to off (or inversely) without embedded electric power. Optical deflectors are used widely in optical pointing applications where fast responses and/or high precisions are critical. An appropriate understanding of the photomobile films behaviour enables to control the direction of the beam deflection within large angular ranges.
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