M. Fazio, Lilly Quintana Barrera, A. Markosyan, R. Bassiri, M. Fejer, Carmen S. Menoniz
{"title":"反应偏置靶沉积混合Ta2O5薄膜的生长与表征","authors":"M. Fazio, Lilly Quintana Barrera, A. Markosyan, R. Bassiri, M. Fejer, Carmen S. Menoniz","doi":"10.1364/OIC.2019.FA.5","DOIUrl":null,"url":null,"abstract":"We present characterization of tantala films mixed with titania or scandia grown by reactive biased target deposition. The introduction of a dopant significantly affected the optical properties of the films and the crystallization temperature.","PeriodicalId":119323,"journal":{"name":"Optical Interference Coatings Conference (OIC) 2019","volume":"22 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2019-06-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Growth and characterization of mixed Ta2O5 thin films by reactive biased target deposition\",\"authors\":\"M. Fazio, Lilly Quintana Barrera, A. Markosyan, R. Bassiri, M. Fejer, Carmen S. Menoniz\",\"doi\":\"10.1364/OIC.2019.FA.5\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"We present characterization of tantala films mixed with titania or scandia grown by reactive biased target deposition. The introduction of a dopant significantly affected the optical properties of the films and the crystallization temperature.\",\"PeriodicalId\":119323,\"journal\":{\"name\":\"Optical Interference Coatings Conference (OIC) 2019\",\"volume\":\"22 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2019-06-02\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Optical Interference Coatings Conference (OIC) 2019\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1364/OIC.2019.FA.5\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Optical Interference Coatings Conference (OIC) 2019","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1364/OIC.2019.FA.5","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Growth and characterization of mixed Ta2O5 thin films by reactive biased target deposition
We present characterization of tantala films mixed with titania or scandia grown by reactive biased target deposition. The introduction of a dopant significantly affected the optical properties of the films and the crystallization temperature.
求助内容：
应助结果提醒方式：
京公网安备 11010802042870号
