{"title":"改善相位噪声的机械耦合微机械谐振器阵列","authors":"Seungbae Lee, C. Nguyen","doi":"10.1109/FREQ.2004.1418444","DOIUrl":null,"url":null,"abstract":"Reductions in phase noise by more than 26 dB have been obtained over previous micromechanical resonator oscillators by replacing the single resonator normally used in such oscillators with a mechanically coupled array of them to effectively raise the power handling ability of the frequency selective tank by a factor equal to the number of resonators used in the array, and all with virtually no increase in volume or cost, given that all resonators are integrated onto a single die using batch processed MEMS technology. Specifically, a mechanically coupled array of ten 15.4-MHz 40/spl mu/m/spl times/10/spl mu/m/spl times/2/spl mu/m free-free beams embedded in a positive feedback loop with a single-ended to differential transimpedance sustaining amplifier achieves phase noise of -109 and -133 dBc/Hz at 1 kHz and far-from-carrier offset frequencies, respectively. When divided down to 10 MHz, these effectively correspond to -112 and -136 dBc/Hz, respectively, which represent more than 17 and 26 dB improvements over recently published work with clamped-clamped beam resonator oscillators.","PeriodicalId":369162,"journal":{"name":"Proceedings of the 2004 IEEE International Frequency Control Symposium and Exposition, 2004.","volume":"4 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2004-08-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"52","resultStr":"{\"title\":\"Mechanically-coupled micromechanical resonator arrays for improved phase noise\",\"authors\":\"Seungbae Lee, C. Nguyen\",\"doi\":\"10.1109/FREQ.2004.1418444\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Reductions in phase noise by more than 26 dB have been obtained over previous micromechanical resonator oscillators by replacing the single resonator normally used in such oscillators with a mechanically coupled array of them to effectively raise the power handling ability of the frequency selective tank by a factor equal to the number of resonators used in the array, and all with virtually no increase in volume or cost, given that all resonators are integrated onto a single die using batch processed MEMS technology. Specifically, a mechanically coupled array of ten 15.4-MHz 40/spl mu/m/spl times/10/spl mu/m/spl times/2/spl mu/m free-free beams embedded in a positive feedback loop with a single-ended to differential transimpedance sustaining amplifier achieves phase noise of -109 and -133 dBc/Hz at 1 kHz and far-from-carrier offset frequencies, respectively. When divided down to 10 MHz, these effectively correspond to -112 and -136 dBc/Hz, respectively, which represent more than 17 and 26 dB improvements over recently published work with clamped-clamped beam resonator oscillators.\",\"PeriodicalId\":369162,\"journal\":{\"name\":\"Proceedings of the 2004 IEEE International Frequency Control Symposium and Exposition, 2004.\",\"volume\":\"4 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2004-08-23\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"52\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Proceedings of the 2004 IEEE International Frequency Control Symposium and Exposition, 2004.\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/FREQ.2004.1418444\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Proceedings of the 2004 IEEE International Frequency Control Symposium and Exposition, 2004.","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/FREQ.2004.1418444","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Mechanically-coupled micromechanical resonator arrays for improved phase noise
Reductions in phase noise by more than 26 dB have been obtained over previous micromechanical resonator oscillators by replacing the single resonator normally used in such oscillators with a mechanically coupled array of them to effectively raise the power handling ability of the frequency selective tank by a factor equal to the number of resonators used in the array, and all with virtually no increase in volume or cost, given that all resonators are integrated onto a single die using batch processed MEMS technology. Specifically, a mechanically coupled array of ten 15.4-MHz 40/spl mu/m/spl times/10/spl mu/m/spl times/2/spl mu/m free-free beams embedded in a positive feedback loop with a single-ended to differential transimpedance sustaining amplifier achieves phase noise of -109 and -133 dBc/Hz at 1 kHz and far-from-carrier offset frequencies, respectively. When divided down to 10 MHz, these effectively correspond to -112 and -136 dBc/Hz, respectively, which represent more than 17 and 26 dB improvements over recently published work with clamped-clamped beam resonator oscillators.