改善相位噪声的机械耦合微机械谐振器阵列

Seungbae Lee, C. Nguyen
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引用次数: 52

摘要

与以前的微机械谐振振荡器相比,通过用机械耦合阵列取代通常用于此类振荡器的单个谐振器,有效地提高了频率选择槽的功率处理能力,其系数等于阵列中使用的谐振器数量,并且几乎没有增加体积或成本,相位噪声降低了26 dB以上。考虑到所有谐振器都使用批量处理的MEMS技术集成到单个芯片上。具体来说,在正反馈环路中嵌入10个15.4 mhz 40/spl mu/m/spl倍/10/spl mu/m/spl倍/2/spl mu/m自由波束的机械耦合阵列,加上单端到差分跨阻维持放大器,在1 kHz和远离载波偏移频率时,相位噪声分别为-109和-133 dBc/Hz。当分割到10 MHz时,这些有效对应于-112和-136 dBc/Hz,这比最近发表的箝位箝位光束谐振振荡器的工作提高了17和26 dB。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Mechanically-coupled micromechanical resonator arrays for improved phase noise
Reductions in phase noise by more than 26 dB have been obtained over previous micromechanical resonator oscillators by replacing the single resonator normally used in such oscillators with a mechanically coupled array of them to effectively raise the power handling ability of the frequency selective tank by a factor equal to the number of resonators used in the array, and all with virtually no increase in volume or cost, given that all resonators are integrated onto a single die using batch processed MEMS technology. Specifically, a mechanically coupled array of ten 15.4-MHz 40/spl mu/m/spl times/10/spl mu/m/spl times/2/spl mu/m free-free beams embedded in a positive feedback loop with a single-ended to differential transimpedance sustaining amplifier achieves phase noise of -109 and -133 dBc/Hz at 1 kHz and far-from-carrier offset frequencies, respectively. When divided down to 10 MHz, these effectively correspond to -112 and -136 dBc/Hz, respectively, which represent more than 17 and 26 dB improvements over recently published work with clamped-clamped beam resonator oscillators.
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