{"title":"一种动态路径规划算法及其在AFM尖端转向中的应用","authors":"S. Mostafa","doi":"10.1115/1.802977.paper13","DOIUrl":null,"url":null,"abstract":"A computer-controlled ultrasonic cleaning system (10) that is designed to clean various articles ranging from integrated-circuit silicone wafers and hard disk platters to small mechanical components. The system (10) utilizes an electronic system which operates in combination with a computer (12) and software (14) to activate a plurality of crystal transducers (32). The crystal transducers (32), which are located on the lower surface of a cleaning tank (40) convert electrical energy, supplied by the electronic system, to acoustic/mechanical energy with a conversion efficiency near 80 percent. The system software includes a program that automatically calibrates the system and corrects crystal-to-crystal deficiencies to maintain the system (10) in a peak operating condition.","PeriodicalId":106395,"journal":{"name":"International Conference on Modeling, Simulation & Visualization Methods","volume":"11 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"A Dynamic Path Planning Algorithm with Application to AFM Tip Steering\",\"authors\":\"S. Mostafa\",\"doi\":\"10.1115/1.802977.paper13\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"A computer-controlled ultrasonic cleaning system (10) that is designed to clean various articles ranging from integrated-circuit silicone wafers and hard disk platters to small mechanical components. The system (10) utilizes an electronic system which operates in combination with a computer (12) and software (14) to activate a plurality of crystal transducers (32). The crystal transducers (32), which are located on the lower surface of a cleaning tank (40) convert electrical energy, supplied by the electronic system, to acoustic/mechanical energy with a conversion efficiency near 80 percent. The system software includes a program that automatically calibrates the system and corrects crystal-to-crystal deficiencies to maintain the system (10) in a peak operating condition.\",\"PeriodicalId\":106395,\"journal\":{\"name\":\"International Conference on Modeling, Simulation & Visualization Methods\",\"volume\":\"11 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"1900-01-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"International Conference on Modeling, Simulation & Visualization Methods\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1115/1.802977.paper13\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"International Conference on Modeling, Simulation & Visualization Methods","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1115/1.802977.paper13","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
A Dynamic Path Planning Algorithm with Application to AFM Tip Steering
A computer-controlled ultrasonic cleaning system (10) that is designed to clean various articles ranging from integrated-circuit silicone wafers and hard disk platters to small mechanical components. The system (10) utilizes an electronic system which operates in combination with a computer (12) and software (14) to activate a plurality of crystal transducers (32). The crystal transducers (32), which are located on the lower surface of a cleaning tank (40) convert electrical energy, supplied by the electronic system, to acoustic/mechanical energy with a conversion efficiency near 80 percent. The system software includes a program that automatically calibrates the system and corrects crystal-to-crystal deficiencies to maintain the system (10) in a peak operating condition.
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