基于硅纳米线平台的混合等离子体元件

L. Wosinski, F. Lou, L. Thylén
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引用次数: 1

摘要

CMOS兼容光子集成电路由于有望解决传统铜互连的问题,在短距离互连中得到了广泛的关注。在电子与光子学的单片集成中,为了提高器件的性能和降低功耗,利用表面等离子激元(SPPs)来减小器件的占地面积已经做了很多努力。然而,对于目前的金属来说,这只适用于单个或几个级联装置。这种情况可以通过将spp与介电模式杂化来缓解;基于硅平台的混合等离子体波导可以提供一种利用等离子体和硅的优点的替代方案。本文介绍了基于硅纳米线平台的混合等离子体功能元件的设计、制造和表征实例,包括混合等离子体定向耦合器、偏振分束器、半径为亚微米的圆盘和环。讨论了一种基于混合等离子环谐振腔的电光聚合物调制器。所提出的组件提供了可能在未来的核间和核内通信系统中有用的新设备的替代观点。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Hybrid plasmonic components based on silicon nanowire platform
CMOS compatible photonic integrated circuits have gained great attentions in short haul interconnects applications because of the promises to tackle the issues of traditional copper interconnects. Towards the monolithic integration of electronics and photonics, lots of efforts have been made to decrease the device footprint by using surface plasmon polaritons (SPPs), in order to enhance performances and decrease power consumption. With current metals, this is, however, only true for single or few cascaded devices. This situation can be mitigated by hybridizing SPPs with dielectric modes; hybrid plasmonic waveguides based on silicon platform can provide an alternative to exploit the advantages of both plasmonics and silicon. This paper presents several examples of design, fabrication and characterization of hybrid plasmonic functional components based on silicon nanowire platform, including hybrid plasmonic directional couplers, polarization beam splitters, disks and rings with submicron radii. A proposal of electro-optic polymer modulator based on hybrid plasmonic ring resonator is also discussed. The presented components provide alternative perspectives of novel devices which may be useful in future inter- and intra-core communication systems.
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