用于评估超长焦距反射镜的紧凑型光学测试设备

H. E. Bennett, J. J. Shaffer
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引用次数: 0

摘要

各种技术已经被用来测试光学平面和长焦距光学的光学图形和曲率半径。如果光学平面变得太大而无法手动处理,它们通常使用里奇- common测试的一种变体来测量,尽管菲索和特怀曼-格林干涉仪也被使用。熟悉的刀口测试是一种极好的手段,用于测量光学平面的光学图形定性使用一个良好的大抛物线在光学台上。该方法还可用于凹面镜形状和曲率半径的测量。然而,如果曲率半径在10到100米范围内,就像激光光学常见的那样,空气湍流会降低测量的准确性。记录长焦距光学图像并确定其曲率半径的一种更定量的技术是使用“透射球”,基本上是一种菲索干涉仪,用于聚光或发散光。入射到透射球上的平行光被透镜聚焦,透镜在样品侧的表面与出射光束准确垂直。因此,它是改进的菲索干涉仪的参考面。透射球可以在各种焦距和f值中获得,但它们相当昂贵,并且在测试的反射镜中特定于相对较短的f值范围。空气湍流是长曲率半径镜的一个问题,就像在刀口测试中一样。生产传输球的Zygo公司也生产用于测试直径30厘米(12英寸)或更大的光学平面的大型光束扩展器。然而,这样大的光束扩展器是相当昂贵的。本文介绍了一种相对便宜的技术,使用Zygo干涉仪和一个或多个透射球,以及一个大抛物面镜或经过良好校正的透镜和条纹分析系统,用于测试大光学平面和大,长焦距凹面镜或凸面镜。一个范围的焦距延伸到无限可以测量不利用长路径长度,从而最大限度地减少空气湍流的问题。凹面镜和凸面镜都可以用同一个透射球来测量,而且与大多数其他测量长焦距光学的技术不同,焦距越长,系统的运行效果越好。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Compact Optical Test Facility for Evaluating Very Long Focal Length Mirrors
Various techniques have been used to test the optical figure and radius of curvature of optical flats and long focal length optics1. If optical flats become too large to be handled manually, they are often measured using a variant of the Ritchie-Common test, although Fizeau and Twyman-Green interferometers have also been used. The familiar knife-edge test is an excellent means for measuring the optical figure of a flat qualitatively using a well-corrected large parabola on an optical bench. It is also useful for measuring the figure and radius of curvature of concave spherical mirrors. If the radius of curvature is in the 10- to 100-m range, however, as is common for laser optics, air turbulence reduces the accuracy of the measurement. A more quantitative technique for recording the optical figure of long focal length optics and determining their radius of curvature is to use a "transmission sphere," basically a Fizeau interferometer modified for converging or diverging light. Parallel light incident on the transmission sphere is focussed by the lens, whose surface on the sample side is accurately normal to the exiting light beams. It thus is the reference surface in the modified Fizeau interferometer. Transmission spheres can be obtained in a variety of focal lengths and f numbers, but they are quite expensive and are specific for a relatively short range of f numbers in the mirrors tested. Air turbulence is a problem for long radius of curvature mirrors just as it is in the knife-edge test. The Zygo Corporation, which manufactures transmission spheres, also manufactures large beam expanders for testing optical flats of 30 cm (12 in.) in diameter or more. However, such large beam expanders are quite expensive. This paper describes a relatively inexpensive technique using the Zygo interferometer and one or more transmission spheres together with a large parabolic mirror or well-corrected lens and a fringe analysis system for testing both large optical flats and large, long focal length concave or convex mirrors. A range of focal lengths extending to infinity can be measured without utilizing long path lengths, thus minimizing air turbulence problems. Both concave and convex mirrors can be measured using the same transmission sphere, and unlike most other techniques for measuring long focal length optics, the longer the focal length the better the system operates.
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