A. Holovatyy, V. Teslyuk, M. Lobur, M. Szermer, C. Maj
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Mask Layout design of single- and double-arm electrothermal microactuators
In this paper, the mask layouts of the single- and double-arm electrothermal microactutors have been designed using the CleWin layout editor. The designed masks will be used for the development of training materials for a course on MEMS fabrication within the framework of the EduMEMS project.