Modeling and Optimization of Continuous Scanning Probe Inspired of the Kirigami Structure

In this paper, a modeling methodology for a continuous scanning probe of Micro-CMM inspired by the Kirigami structure was investigated. The displacement of the probe and the stress of the structure were computed by using the finite element method of Ansys software as the input parameter of the grey relation analysis to optimize the geometry parameter of the structure such as the thickness of the flexure sheet, the width of the flexure hinge, and the length of the flexure hinge. The thickness of the flexure sheet was 0.3 mm, the width of the flexure hinge was 1.5 mm, the length of the flexure hinge was 3 mm, which lead to the highest displacement of the probe. The contribution and the interaction of the thickness factor to the remaining elements are remarkable. The displacement of the probe can be reached at 4.546 mm.