一种用于SOI过程的紧凑螺旋Mach-Zehnder干涉仪调制器

2015 IEEE 12th International Conference on Group IV Photonics (GFP) Pub Date : 2015-10-26 DOI:10.1109/GROUP4.2015.7305996

Aroutin Khachaturian, Behrooz Abiri, A. Hajimiri

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引用次数: 0

摘要

介绍了一种具有9GHz三维b波段宽度的紧凑型螺旋马赫-曾德尔干涉仪调制器。螺旋MZ1结构允许高密度集成，并通过在550μm×650μm硅区封装两个3mm长的移相器来降低成本。

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A compact spiral Mach-Zehnder Interferometer Modulator on SOI process

A compact, spiral Mach-Zehnder Interferometer modulator with 9GHz 3d B-band width has been demonstrated. The spiral MZ1 structure allows for high density integration and reduces the cost by wrapping two 3mm long phase shifters in a 550μm×650μm silicon area.

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2015 IEEE 12th International Conference on Group IV Photonics (GFP)

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