Xiaochuan Ji, Jinlong Zhang, Xinbin Cheng, Zhanshan Wang, I. Matvienko, T. Isaev, A. Tikhonravov
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The Error Self-Compensation Effect in the Broadband Monitoring of Multiband Filters
The paper investigates production of the multiband filter by broadband monitoring. A special 4-line filter was designed and the simulation demonstrated the layer thickness errors self-compensation effect that was quite significant.
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