碳化钨刀具上纳米/微晶金刚石多层涂层的微波CVD沉积及性能

2017 International Conference on Mechanical, System and Control Engineering (ICMSC) Pub Date : 2017-05-19 DOI:10.1109/ICMSC.2017.7959433

A. Khomich, M. Kozlova, E. Ashkinazi, V. Sedov, D. Sovyk, D. Vinogradov, P. Tsygankov

{"title":"碳化钨刀具上纳米/微晶金刚石多层涂层的微波CVD沉积及性能","authors":"A. Khomich, M. Kozlova, E. Ashkinazi, V. Sedov, D. Sovyk, D. Vinogradov, P. Tsygankov","doi":"10.1109/ICMSC.2017.7959433","DOIUrl":null,"url":null,"abstract":"Micro/Nanocrystalline multilayer diamond coatings (DC) were produced using a microwave plasma-assisted CVD process from CH4/H2 (microcrystalline) and CH4/H2/N2 (nanocrystalline) gas mixtures and deposited on common tungsten carbide tools. High resolution surface electron microscopy, Raman spectroscopy, friction, wear and scratching resistance tests were performed to study properties of the four series of DC. It was shown that such multilayer DC not only display good adhesion and wear resistant properties, but also have high surface smoothness and extremely low friction coefficient.","PeriodicalId":356055,"journal":{"name":"2017 International Conference on Mechanical, System and Control Engineering (ICMSC)","volume":"9 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2017-05-19","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"3","resultStr":"{\"title\":\"Microwave CVD deposition and properties of nano / microcrystalline diamond multilayer coatings on tungsten carbide cutting tools\",\"authors\":\"A. Khomich, M. Kozlova, E. Ashkinazi, V. Sedov, D. Sovyk, D. Vinogradov, P. Tsygankov\",\"doi\":\"10.1109/ICMSC.2017.7959433\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Micro/Nanocrystalline multilayer diamond coatings (DC) were produced using a microwave plasma-assisted CVD process from CH4/H2 (microcrystalline) and CH4/H2/N2 (nanocrystalline) gas mixtures and deposited on common tungsten carbide tools. High resolution surface electron microscopy, Raman spectroscopy, friction, wear and scratching resistance tests were performed to study properties of the four series of DC. It was shown that such multilayer DC not only display good adhesion and wear resistant properties, but also have high surface smoothness and extremely low friction coefficient.\",\"PeriodicalId\":356055,\"journal\":{\"name\":\"2017 International Conference on Mechanical, System and Control Engineering (ICMSC)\",\"volume\":\"9 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2017-05-19\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"3\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2017 International Conference on Mechanical, System and Control Engineering (ICMSC)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/ICMSC.2017.7959433\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2017 International Conference on Mechanical, System and Control Engineering (ICMSC)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ICMSC.2017.7959433","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}

引用次数: 3

摘要

采用微波等离子体辅助CVD工艺，将CH4/H2(微晶)和CH4/H2/N2(纳米晶)气体混合制备了微/纳米晶多层金刚石涂层(DC)，并将其沉积在普通碳化钨刀具上。通过高分辨率表面电子显微镜、拉曼光谱、摩擦、磨损和刮擦性能测试研究了四种系列直流材料的性能。结果表明，该多层直流材料不仅具有良好的附着力和耐磨性，而且表面光洁度高，摩擦系数极低。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

查看原文本刊更多论文

Microwave CVD deposition and properties of nano / microcrystalline diamond multilayer coatings on tungsten carbide cutting tools

Micro/Nanocrystalline multilayer diamond coatings (DC) were produced using a microwave plasma-assisted CVD process from CH4/H2 (microcrystalline) and CH4/H2/N2 (nanocrystalline) gas mixtures and deposited on common tungsten carbide tools. High resolution surface electron microscopy, Raman spectroscopy, friction, wear and scratching resistance tests were performed to study properties of the four series of DC. It was shown that such multilayer DC not only display good adhesion and wear resistant properties, but also have high surface smoothness and extremely low friction coefficient.

求助全文

通过发布文献求助，成功后即可免费获取论文全文。去求助

来源期刊

2017 International Conference on Mechanical, System and Control Engineering (ICMSC)

自引率

0.00%

发文量