一种具有上调谐结构的新型MEMS加速度计

2016 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO) Pub Date : 2016-07-01 DOI:10.1109/3M-NANO.2016.7824923

Yixuan Guo, Zhong-he Jin, J. Du, Yidong Liu

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引用次数: 1

摘要

介绍了一种具有上调谐结构的新型微机电系统加速度计的设计、实现和特性。在某些情况下，由于相对较大的加速度，梁的弹簧非常脆弱，很容易断裂，无法修复。上调效果可以极大地解决这一问题，使梁的弹簧变硬。首先介绍了调谐结构的理论设计和工作原理。然后介绍了制作工艺和参数。最后进行了实验研究。当调谐电压从0V到12V变化时，谐振频率可以从386Hz调谐到407Hz。等效弹簧常数可以从65N/m调整到72N/m。采用上调谐结构的新型MEMS加速度计线性度可达99.9865%。

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A new type of MEMS accelerometer with up-tuning structure

In this paper, design, implementation and characterization of a new type of Micro-electromechanical system (MEMS) accelerometer with up-tuning structure is presented. Under some circumstances, the spring of the beam is very fragile and can be easily broken which is unrepairable due to a relatively large acceleration. Up-tuning effect can greatly solve the problem and harden the spring of the beam. Firstly, the theoretical design and working principle of tuning structure are presented. Then, fabrication process and parameters is illustrated. Finally, experiments are conducted. The resonant frequency can be tuned from 386Hz to 407Hz when the tuning voltage changes from 0V to 12V. The equivalent spring constant can be tuned from 65N/m to 72N/m. The linearity of the new type of MEMS accelerometer with up-tuning structure can reach 99.9865%.

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2016 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)

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