{"title":"超大规模集成电路技术中SOI的演进与扩展:平面到三维","authors":"G. Patton","doi":"10.1109/SOI.2012.6404357","DOIUrl":null,"url":null,"abstract":"□ SOI has enabled industry leadership in planar CMOS exemplified by both digital and analog mixed-signal applications □ Innovative future opportunities for SOI as Industry moves to Fully Depleted Architectures and beyond Uniformity and Variability control are at the forefront! □ Paradigm shift in SOI value proposition as FinFET era arrives.","PeriodicalId":306839,"journal":{"name":"2012 IEEE International SOI Conference (SOI)","volume":"3 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2012-10-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"9","resultStr":"{\"title\":\"Evolution and expansion of SOI in VLSI technologies: Planar to 3D\",\"authors\":\"G. Patton\",\"doi\":\"10.1109/SOI.2012.6404357\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"□ SOI has enabled industry leadership in planar CMOS exemplified by both digital and analog mixed-signal applications □ Innovative future opportunities for SOI as Industry moves to Fully Depleted Architectures and beyond Uniformity and Variability control are at the forefront! □ Paradigm shift in SOI value proposition as FinFET era arrives.\",\"PeriodicalId\":306839,\"journal\":{\"name\":\"2012 IEEE International SOI Conference (SOI)\",\"volume\":\"3 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2012-10-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"9\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2012 IEEE International SOI Conference (SOI)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/SOI.2012.6404357\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2012 IEEE International SOI Conference (SOI)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/SOI.2012.6404357","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Evolution and expansion of SOI in VLSI technologies: Planar to 3D
□ SOI has enabled industry leadership in planar CMOS exemplified by both digital and analog mixed-signal applications □ Innovative future opportunities for SOI as Industry moves to Fully Depleted Architectures and beyond Uniformity and Variability control are at the forefront! □ Paradigm shift in SOI value proposition as FinFET era arrives.