考虑到加工条纹影响的圆棒表面粗糙度非接触测量法

Y. Igarashi, Kazunori Yamazaki
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摘要

通过测量散射光,我们的目标是提高人工检测的准确性和自动化程度。在这项研究中,我们试图通过捕获和分析散射光分布来测量圆棒样品曲率表面的非接触表面粗糙度。并对加工痕迹对圆棒的影响进行了评价。用He-Ne激光器(光斑直径Φ0.8 mm,最大功率8 mW,波长632.8 nm)照射冷锻圆棒工件(表面抛光),扫描PIN光电二极管(传感器尺寸Φ1.5 mm)获得散射光强分布。将检测到的散射光分布拟合到基于广义Harvey-Shack理论的散射光分布模型中,计算表面粗糙度参数。提取的粗糙度参数为均方根粗糙度“Rq”和自协方差半宽度“lc”。对PIN光电二极管沿加工条纹方向和与加工条纹正交方向进行扫描,用两方向lc的比值评价表面粗糙度各向异性参数Str。通过确定“Str”,我们可以考虑加工条纹对机器性能的影响。本文介绍了Str的评估结果,并与传统方法进行了比较,该方法可以进行非接触、非破坏性的测量。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Non-contact surface roughness measurement of round bars considering the effect of machining striations
By measuring scattered light, our goal is to improve the accuracy and automation of manual inspection. In this study, we attempted to measure the non-contact surface roughness of the curvature surface of a round bar sample by capturing and analyzing the scattered light distribution. We also evaluated the influence of machining marks on the round bar. A round bar workpiece (cold forged material, surface polished) was irradiated with a He-Ne laser (spot diameter Φ0.8 mm, maximum power 8 mW, wavelength 632.8 nm) and a PIN photodiode (sensor size Φ1.5 mm) was scanned to acquire the scattered light intensity distribution. The detected scattered light distribution was fitted to a scattered light distribution model based on the generalized Harvey-Shack theory to calculate surface roughness parameters. The extracted roughness parameters are root mean square roughness ”Rq” and half width of autocovariance ”lc”. The PIN photodiode was scanned in the direction of the machining striations and in the direction orthogonal to the striations, and the ratio of the lc in the two directions was used to evaluate the surface roughness anisotropy parameter ”Str”. By determining ”Str”, we can consider the effect of machining striations on machine performance. This paper presents the results of the evaluation of Str compared to the conventional method, which allows non-contact, non-destructive measurement.
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