高功率脉冲磁控溅射正电压逆转(HIPIMS+VR)和脉冲直流电沉积聚合物网上Cu和TiO2的涂层性能

{"title":"高功率脉冲磁控溅射正电压逆转(HIPIMS+VR)和脉冲直流电沉积聚合物网上Cu和TiO2的涂层性能","authors":"M. Simmons","doi":"10.14332/svc19.proc.0070","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":220126,"journal":{"name":"Annual Technical Conference Proceedings","volume":"117 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2019-09-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Coating Properties of Cu and TiO2 on Polymer Web Deposited by High Power Impulse Magnetron Sputtering With Positive Voltage Reversal (HIPIMS+VR) and Pulsed DC\",\"authors\":\"M. Simmons\",\"doi\":\"10.14332/svc19.proc.0070\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"\",\"PeriodicalId\":220126,\"journal\":{\"name\":\"Annual Technical Conference Proceedings\",\"volume\":\"117 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2019-09-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Annual Technical Conference Proceedings\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.14332/svc19.proc.0070\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Annual Technical Conference Proceedings","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.14332/svc19.proc.0070","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}