大气对RF-MEMS电容开关可靠性的影响

2007 European Microwave Integrated Circuit Conference Pub Date : 2007-12-26 DOI:10.1109/EMICC.2007.4412771

P. Blondy, A. Crunteanu, A. Pothier, P. Tristant, A. Catherinot, C. Champeaux

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引用次数: 19

摘要

研究了大气对电容式RF-MEMS开关的影响。结果表明，环境气氛不仅会对MEMS开关的退化产生增量效应，而且会彻底改变电介质的充电机制，直接关系到RF-MEMS开关的可靠性行为。在干燥环境中操作RF-MEMS开关将使充电机制从表面充电转变为批量充电。

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Effects of atmosphere on the reliability of RF-MEMS capacitive switches

The influence of atmosphere on capacitive RF-MEMS switches is studied. It is shown that ambient atmosphere not only induces an incremental effect on the degradation of MEMS switches but also completely changes the charging mechanism of the dielectrics, directly linked with RF-MEMS reliability behaviour of MEMS switches reliability. Operating RF-MEMS switches in a dry environment changes the mechanism of charging from surface charging to bulk charging.

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2007 European Microwave Integrated Circuit Conference

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