环形微陀螺传感元件制造中平衡工艺的特点实现

2021 IEEE Conference of Russian Young Researchers in Electrical and Electronic Engineering (ElConRus) Pub Date : 2021-01-26 DOI:10.1109/ElConRus51938.2021.9396423

M. Nikitkov, B. M. Simonov, S. Simonov, O. Britkov

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引用次数: 0

摘要

介绍了一种环形微机械陀螺仪传感元件的设计。考虑了激光在环的相邻部分打孔平衡工艺过程的特点。在其传导过程中，必须选择激光脉冲的能量和持续时间，以使硅滴不会落在SE环的结构元素上。

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Features Implementation on Balancing Process in Manufacture of Ring Microgyroscope Sensing Element

The design of the sensing element (SE) of a ring micromechanical gyroscope is presented. Features of the technological process of its balancing by means of laser punching holes in adjacent segments of the ring are considered. It is established that during its conduction, the energy and duration of the laser pulse must be selected in such a way that silicon drops do not fall on the structural elements of the SE ring.

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2021 IEEE Conference of Russian Young Researchers in Electrical and Electronic Engineering (ElConRus)

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