Antoine Perraudat, Alexandre Lima, S. Dauzére-Pérés, P. Vialletelle
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A decision support system for a critical time constraint tunnel
This paper motivates the development of and presents a Decision Support System (DSS) for a critical Time Constraint Tunnel (TCT) in a High-Mix/Low-Volume (HMLV) 300mm wafer fab. The DSS downloads the status of the machines, their qualifications, the location of lots within and in front of the tunnel, and suggests release dates for lots of different critical technologies. The tunnel structure and the problem are described, together with the DSS and details on its implementation and industrial use.
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