傅立叶变换移相干涉法计算折射率均匀性的方法

O. Matousek, V. Ledl, P. Psota, P. Vojtíšek
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引用次数: 1

摘要

傅里叶变换相移干涉法使精确测量材料折射率变化成为可能。在四面腔中观察到六个一阶干涉图。在标准的方法中,从样品的正面和背面反射的波之间的干涉被用来获得折射率均匀性。但另外三种干涉图包含了内部非均匀性的信息,也可用于计算内部非均匀性。本文对这四种计算方法进行了介绍和比较。测量和模拟结果表明,这些方法在全球范围内得到了相似的结果。然而,由于采用不同的干涉图进行计算,每个结果都会受到不同的不良影响。这种差异可以用来抑制效应,从而改进结果。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Methods for refractive-index homogeneity calculation using Fourier-transform phase-shifting interferometry
Fourier-transform phase-shifting interferometry brings the possibility of a very precise measurement of refractive-index variation in a material. In a four surface cavity six first order interferograms are observed. In the standard way an interference between waves reflected from a front and a rear surface of a sample is used to obtain refractive-index homogeneity. But another three interferograms contain information about inner inhomogeneity and can be used for its calculation as well. In this paper all four calculation methods are presented and compared. The measurements and simulations show, the methods give us globally similar outputs. However due to calculation from different interferograms every result is affected by different undesirable effects. This difference can be used for suppression of the effects and thus to refine the results.
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