基于激光自混频干涉的微振动测量技术研究

Proceedings of 2013 2nd International Conference on Measurement, Information and Control Pub Date : 2013-08-01 DOI:10.1109/MIC.2013.6757921

Yin Shuxin, Huang Caojun

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引用次数: 2

摘要

研究了基于自混合干涉的振动测量的基本原理和理论模型，从理论上分析了自混合干涉测量微振动系统的可行性。设计并搭建了自混合干扰测试系统，并进行了试验。测试结果表明，该装置能获得较好的自混频干扰信号，微振动测量精度可达325nm。

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Research on micro-vibration measurement technique based on laser self-mixing interference

This paper studies the basic principle and theoretic model of the vibration measurement based on self-mixing interference, and analyzes the feasibility of self-mixing interference measuring micro vibration system theoretically. A self-mixing interference test system was designed and built which were tried. The test results show that the device can get a better self-mixing interference signal, and micro vibration measurement precision can reach 325nm.

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Proceedings of 2013 2nd International Conference on Measurement, Information and Control

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