Ta/sub - 2/O/sub - 5/薄膜石英上的剪切水平型表面声波

2002 IEEE Ultrasonics Symposium, 2002. Proceedings. Pub Date : 2002-10-08 DOI:10.1109/ULTSYM.2002.1193434

S. Kakio, Y. Shimatai, Y. Nakagawa

{"title":"Ta/sub - 2/O/sub - 5/薄膜石英上的剪切水平型表面声波","authors":"S. Kakio, Y. Shimatai, Y. Nakagawa","doi":"10.1109/ULTSYM.2002.1193434","DOIUrl":null,"url":null,"abstract":"In this paper, the propagation characteristics of two modes of surface acoustic waves (SAWs) on ST quartz with a tantalum pentoxide (Ta/sub 2/O/sub 5/) thin film are investigated theoretically and experimentally. One is the pure shear-horizontal (SH) wave and the another is the Love-wave-type SAW converted from the leaky SAW (LSAW). For these SAWs, stronger energy trapping effects on the surface can be expected by loading the substrate with the TA/sub 2/O/sub 5/ thin film, because this film has a relatively high density. In fact, the film thickness of the Ta/sub 2/O/sub 5/ film required to obtain the minimum insertion loss and the maximum K/sup 2/ for the SH wave on ST-90/spl deg/X quartz is around 0.01 /spl lambda/, which is approximately one-fourth of that reported for silicon dioxide film. Furthermore, the attenuation of the LSAW on ST quartz was reduced by loading with the Ta/sub 2/O/sub 5/ film because the LSAW becomes the Love-wave-type SAW without attenuation.","PeriodicalId":378705,"journal":{"name":"2002 IEEE Ultrasonics Symposium, 2002. Proceedings.","volume":"1 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2002-10-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":"{\"title\":\"Shear-horizontal-type surface acoustic waves on quartz with Ta/sub 2/O/sub 5/ thin film\",\"authors\":\"S. Kakio, Y. Shimatai, Y. Nakagawa\",\"doi\":\"10.1109/ULTSYM.2002.1193434\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"In this paper, the propagation characteristics of two modes of surface acoustic waves (SAWs) on ST quartz with a tantalum pentoxide (Ta/sub 2/O/sub 5/) thin film are investigated theoretically and experimentally. One is the pure shear-horizontal (SH) wave and the another is the Love-wave-type SAW converted from the leaky SAW (LSAW). For these SAWs, stronger energy trapping effects on the surface can be expected by loading the substrate with the TA/sub 2/O/sub 5/ thin film, because this film has a relatively high density. In fact, the film thickness of the Ta/sub 2/O/sub 5/ film required to obtain the minimum insertion loss and the maximum K/sup 2/ for the SH wave on ST-90/spl deg/X quartz is around 0.01 /spl lambda/, which is approximately one-fourth of that reported for silicon dioxide film. Furthermore, the attenuation of the LSAW on ST quartz was reduced by loading with the Ta/sub 2/O/sub 5/ film because the LSAW becomes the Love-wave-type SAW without attenuation.\",\"PeriodicalId\":378705,\"journal\":{\"name\":\"2002 IEEE Ultrasonics Symposium, 2002. Proceedings.\",\"volume\":\"1 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2002-10-08\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"1\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2002 IEEE Ultrasonics Symposium, 2002. Proceedings.\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/ULTSYM.2002.1193434\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2002 IEEE Ultrasonics Symposium, 2002. Proceedings.","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ULTSYM.2002.1193434","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}

引用次数: 1

摘要

本文从理论上和实验上研究了五氧化二钽(Ta/sub 2/O/sub 5/)薄膜在ST石英表面两种模式声波的传播特性。一种是纯剪切水平波(SH)，另一种是由泄漏SAW (LSAW)转换而成的love -wave型SAW。对于这些saw来说，由于TA/sub 2/O/sub 5/薄膜具有相对较高的密度，因此可以通过在衬底上加载TA/sub 2/O/sub 5薄膜来获得更强的表面能量捕获效应。事实上，在ST-90/spl°/X石英上获得SH波的最小插入损耗和最大K/sup 2/所需的Ta/sub 2/O/sub 5/薄膜厚度约为0.01 /spl lambda/，约为二氧化硅薄膜厚度的四分之一。此外，加载Ta/sub 2/O/sub 5/薄膜可以降低ST石英表面上LSAW的衰减，使LSAW变为无衰减的love -wave型SAW。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

查看原文本刊更多论文

Shear-horizontal-type surface acoustic waves on quartz with Ta/sub 2/O/sub 5/ thin film

In this paper, the propagation characteristics of two modes of surface acoustic waves (SAWs) on ST quartz with a tantalum pentoxide (Ta/sub 2/O/sub 5/) thin film are investigated theoretically and experimentally. One is the pure shear-horizontal (SH) wave and the another is the Love-wave-type SAW converted from the leaky SAW (LSAW). For these SAWs, stronger energy trapping effects on the surface can be expected by loading the substrate with the TA/sub 2/O/sub 5/ thin film, because this film has a relatively high density. In fact, the film thickness of the Ta/sub 2/O/sub 5/ film required to obtain the minimum insertion loss and the maximum K/sup 2/ for the SH wave on ST-90/spl deg/X quartz is around 0.01 /spl lambda/, which is approximately one-fourth of that reported for silicon dioxide film. Furthermore, the attenuation of the LSAW on ST quartz was reduced by loading with the Ta/sub 2/O/sub 5/ film because the LSAW becomes the Love-wave-type SAW without attenuation.

求助全文

通过发布文献求助，成功后即可免费获取论文全文。去求助

来源期刊

2002 IEEE Ultrasonics Symposium, 2002. Proceedings.

自引率

0.00%

发文量