利用共面波导变容体表征铁电薄膜

2012 IEEE National Aerospace and Electronics Conference (NAECON) Pub Date : 2012-07-25 DOI:10.1109/NAECON.2012.6531046

D. Brown, M. Qumsiyeh, G. Subramanyam, M. Patterson, C. H. Zhang

{"title":"利用共面波导变容体表征铁电薄膜","authors":"D. Brown, M. Qumsiyeh, G. Subramanyam, M. Patterson, C. H. Zhang","doi":"10.1109/NAECON.2012.6531046","DOIUrl":null,"url":null,"abstract":"This paper investigates the implementation of a least squares estimation of varactor capacitance values across a wafer for reasons of characterizing thin-film ferroelectric Ba0.6Sr0.4TiO3, barium strontium titanate (BST). The varactor design utilized for this characterization as well as an equivalent schematic representation of the device used will be presented. Comparisons between the estimated thin-film performance and those of previously presented results will also be discussed.","PeriodicalId":352567,"journal":{"name":"2012 IEEE National Aerospace and Electronics Conference (NAECON)","volume":"1 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2012-07-25","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":"{\"title\":\"Ferroelectric thin-film characterization through use of coplanar waveguide varactors\",\"authors\":\"D. Brown, M. Qumsiyeh, G. Subramanyam, M. Patterson, C. H. Zhang\",\"doi\":\"10.1109/NAECON.2012.6531046\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"This paper investigates the implementation of a least squares estimation of varactor capacitance values across a wafer for reasons of characterizing thin-film ferroelectric Ba0.6Sr0.4TiO3, barium strontium titanate (BST). The varactor design utilized for this characterization as well as an equivalent schematic representation of the device used will be presented. Comparisons between the estimated thin-film performance and those of previously presented results will also be discussed.\",\"PeriodicalId\":352567,\"journal\":{\"name\":\"2012 IEEE National Aerospace and Electronics Conference (NAECON)\",\"volume\":\"1 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2012-07-25\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"1\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2012 IEEE National Aerospace and Electronics Conference (NAECON)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/NAECON.2012.6531046\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2012 IEEE National Aerospace and Electronics Conference (NAECON)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/NAECON.2012.6531046","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}

引用次数: 1

摘要

为了表征薄膜铁电材料Ba0.6Sr0.4TiO3，钡钛酸锶(BST)，本文研究了晶圆上变容电容值的最小二乘估计方法的实现。将介绍用于此表征的变容管设计以及所使用器件的等效原理图表示。我们还将讨论估计薄膜性能与先前给出的结果之间的比较。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Ferroelectric thin-film characterization through use of coplanar waveguide varactors

This paper investigates the implementation of a least squares estimation of varactor capacitance values across a wafer for reasons of characterizing thin-film ferroelectric Ba0.6Sr0.4TiO3, barium strontium titanate (BST). The varactor design utilized for this characterization as well as an equivalent schematic representation of the device used will be presented. Comparisons between the estimated thin-film performance and those of previously presented results will also be discussed.

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2012 IEEE National Aerospace and Electronics Conference (NAECON)

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