旋涂工艺对PVDF-TrFE/ZnO薄膜铁电相影响的研究

2016 Symposium on Piezoelectricity, Acoustic Waves, and Device Applications (SPAWDA) Pub Date : 2016-10-01 DOI:10.1109/SPAWDA.2016.7829998

Kairui Xia, Yingchun Li, Jie Li, B. Xie, Chunmao Zhao, Jing Han

{"title":"旋涂工艺对PVDF-TrFE/ZnO薄膜铁电相影响的研究","authors":"Kairui Xia, Yingchun Li, Jie Li, B. Xie, Chunmao Zhao, Jing Han","doi":"10.1109/SPAWDA.2016.7829998","DOIUrl":null,"url":null,"abstract":"It is well known that Poly (vinylidene fluoride) (PVDF) and the family of P(VDF-TrFE) [TrFE = trifluoroethylene] copolymers are crucial candidates for high-performance piezoelectric devices. In this research article, a series of PVDF-TrFE/ZnO thin films were prepared by means of spin-coating method. Different parameters of this process such as the speed of spin-coating and temperature of annealing were discussed. In order to investigate the effect of these parameters on the ferroelectric phase of samples, various characterizations such as SEM, FTIR, XRD and DSC were utilized. Results revealed that annealing temperature played a significant role in the crystallinity of those thin films, the transformation of ferroelectric phase and the perfection degree of crystallization. Besides, with in a certain range, the lower speed of spin-coating favors better formation of ferroelectric phase.","PeriodicalId":243839,"journal":{"name":"2016 Symposium on Piezoelectricity, Acoustic Waves, and Device Applications (SPAWDA)","volume":"277 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2016-10-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"2","resultStr":"{\"title\":\"Research on the effect of spin-coating process on ferroelectric phase of PVDF-TrFE/ZnO film\",\"authors\":\"Kairui Xia, Yingchun Li, Jie Li, B. Xie, Chunmao Zhao, Jing Han\",\"doi\":\"10.1109/SPAWDA.2016.7829998\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"It is well known that Poly (vinylidene fluoride) (PVDF) and the family of P(VDF-TrFE) [TrFE = trifluoroethylene] copolymers are crucial candidates for high-performance piezoelectric devices. In this research article, a series of PVDF-TrFE/ZnO thin films were prepared by means of spin-coating method. Different parameters of this process such as the speed of spin-coating and temperature of annealing were discussed. In order to investigate the effect of these parameters on the ferroelectric phase of samples, various characterizations such as SEM, FTIR, XRD and DSC were utilized. Results revealed that annealing temperature played a significant role in the crystallinity of those thin films, the transformation of ferroelectric phase and the perfection degree of crystallization. Besides, with in a certain range, the lower speed of spin-coating favors better formation of ferroelectric phase.\",\"PeriodicalId\":243839,\"journal\":{\"name\":\"2016 Symposium on Piezoelectricity, Acoustic Waves, and Device Applications (SPAWDA)\",\"volume\":\"277 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2016-10-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"2\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2016 Symposium on Piezoelectricity, Acoustic Waves, and Device Applications (SPAWDA)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/SPAWDA.2016.7829998\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2016 Symposium on Piezoelectricity, Acoustic Waves, and Device Applications (SPAWDA)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/SPAWDA.2016.7829998","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}

引用次数: 2

摘要

众所周知，聚偏氟乙烯(PVDF)和P(VDF-TrFE) [TrFE =三氟乙烯]共聚物家族是高性能压电器件的重要候选材料。本文采用旋涂法制备了一系列PVDF-TrFE/ZnO薄膜。讨论了该工艺的不同参数，如旋涂速度和退火温度。为了研究这些参数对样品铁电相的影响，采用了SEM、FTIR、XRD和DSC等多种表征手段。结果表明，退火温度对这些薄膜的结晶度、铁电相的转变和结晶的完善程度有重要影响。在一定范围内，转速越低越有利于铁电相的形成。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

查看原文本刊更多论文

Research on the effect of spin-coating process on ferroelectric phase of PVDF-TrFE/ZnO film

It is well known that Poly (vinylidene fluoride) (PVDF) and the family of P(VDF-TrFE) [TrFE = trifluoroethylene] copolymers are crucial candidates for high-performance piezoelectric devices. In this research article, a series of PVDF-TrFE/ZnO thin films were prepared by means of spin-coating method. Different parameters of this process such as the speed of spin-coating and temperature of annealing were discussed. In order to investigate the effect of these parameters on the ferroelectric phase of samples, various characterizations such as SEM, FTIR, XRD and DSC were utilized. Results revealed that annealing temperature played a significant role in the crystallinity of those thin films, the transformation of ferroelectric phase and the perfection degree of crystallization. Besides, with in a certain range, the lower speed of spin-coating favors better formation of ferroelectric phase.

求助全文

通过发布文献求助，成功后即可免费获取论文全文。去求助

来源期刊

2016 Symposium on Piezoelectricity, Acoustic Waves, and Device Applications (SPAWDA)

自引率

0.00%

发文量