毫米波器件的共面与微带测量

40th ARFTG Conference Digest Pub Date : 1992-12-01 DOI:10.1109/ARFTG.1992.326996

P. Walters, R. Pollard, J. Richardson, P. Gamand, P. Suchet

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引用次数: 1

摘要

本文的目的是识别毫米波小信号散射参数器件在晶圆上测量的共面和微带测试格式的区别。研究了共面和微带的校准，确定了毫米波频率范围内的测量参考面和可能存在的校准问题。考虑了不同的器件模型参考平面。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Coplanar Versus Microstrip Measurements of Millimetre-Wave Devices

The purpose of this paper is to identify the differences between millimetre-wave small-signal scattering parameter device measurements on-wafer in coplanar and microstrip test formats. Calibration in coplanar and microstrip is examined to determine the measurement reference planes and possible calibration problems in the millimetre-wave frequency range. Different device model reference planes are considered.

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40th ARFTG Conference Digest

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