飞秒激光烧蚀砷化镓的飞行时间测量

CLEO/Europe Conference on Lasers and Electro-Optics Pub Date : 1998-09-14 DOI:10.1109/CLEOE.1998.719356

A. Cavalleri, K. Sokolowski-Tinten, J. Bialkowski, D. von der Linde

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摘要

本文测量了砷化镓表面蒸发粒子的飞行时间(TOF)分布，以确定其在飞秒辐照(100 fs, 620 nm)时的最高温度。四极杆质谱仪(QMS)提供了给定粒子质量在激光激发后的TOF分布。

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Time of Flight Measurement During Femtosecond Laser Ablation of Gallium Arsenide

Time of flight (TOF) distributions of evaporated particles from the surface of GaAs have been measured in order to determine its maximum temperature during femtosecond irradiation (100 fs, 620 nm). A quadrupole mass spectrometer (QMS) provides the TOF distribution of a given particle mass after laser excitation.

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CLEO/Europe Conference on Lasers and Electro-Optics

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