利用超声波谐振器的LTCC/PZT差压传感器

Proceedings of the 2014 37th International Spring Seminar on Electronics Technology Pub Date : 2014-05-07 DOI:10.1109/ISSE.2014.6887632

A. Dąbrowski, L. Golonka

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引用次数: 3

摘要

本文介绍了一种利用超声波的差压传感器的技术和性能。该器件由LTCC(低温共烧陶瓷)膜与PZT(锆钛酸铅)活性层和两个互指换能器(idt)组成。该传感器是一个完全陶瓷结构，配有两个气体入口，因此可以测量高达20kpa的压差。传感器的特性是在谐振器模式下确定的，在谐振器模式下，在压力和温度变化期间观察到频移。该传感器的灵敏度约为- 400hz /kPa，热漂移约为- 2000hz /℃。描述了电子电路:放大器和频率计数器。热漂移采用集成厚膜PTC(正温度系数)电阻和软件校正进行补偿。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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LTCC/PZT differential pressure sensor utilizing ultrasonic wave resonator

In the paper technology and properties of a differential pressure sensor utilizing ultrasonic waves are presented. The device consists of a LTCC (Low Temperature Co-fired Ceramics) membrane with PZT (Lead Zirconate Titanate) active layer with two interdigitated transducers (IDTs). The sensor is a completely ceramic structure equipped with two gas inlets, hence measurements of differential pressure up to 20 kPa is possible. The properties of the sensor are determined in resonator mode, where frequency shift is observed during pressure and temperature changes. The sensor exhibits sensitivity of about -400 Hz/kPa and a thermal drift of about -2000 Hz/°C. Electronic circuits: amplifier and frequency counter are described. The thermal drift is compensated using an integrated thick-film PTC (positive temperature coefficient) resistor and software correction.

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Proceedings of the 2014 37th International Spring Seminar on Electronics Technology

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