用于CMOS MEMS加速度计的低噪声低偏置斩波稳定电容读出放大器

2002 IEEE International Solid-State Circuits Conference. Digest of Technical Papers (Cat. No.02CH37315) Pub Date : 2002-08-07 DOI:10.1109/ISSCC.2002.993115

Jiangfeng Wu, G. Fedder, L. Carley

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引用次数: 67

摘要

CMOS斩波稳定放大器具有直流和交流失调抵消，用于MEMS结构中的运动电容读出，实现40 nV//spl径向/HZ底噪声，10 mV直流失调和40 dB传感器失调降低。该放大器集成到CMOS-MEMS加速度计中，实现了50 /spl μ /g//spl径向/Hz的底噪声。

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A low-noise low-offset chopper-stabilized capacitive-readout amplifier for CMOS MEMS accelerometers

A CMOS chopper-stabilized amplifier with both DC and AC offset cancellation, for capacitive readout of motion in MEMS structures, achieves 40 nV//spl radic/HZ noise floor, 10 mV DC offset, and 40 dB sensor offset reduction. The amplifier, integrated into a CMOS-MEMS accelerometer, achieves 50 /spl mu/g//spl radic/Hz noise floor.

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2002 IEEE International Solid-State Circuits Conference. Digest of Technical Papers (Cat. No.02CH37315)

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