Fabrication of all-solid-state amorphous thin-film Lithium-ion batteries

In this study, we fabricated all-solid-state amorphous thin-film lithium-ion batteries (LIBs) on glass or polyimide substrates by RF-sputtering and evaluated their electrochemical performance. The thin-film LIBs were composed of amorphous multilayer of lithium-doped vanadium oxide, lithium phosphorus oxynitride (LiPON), and Si as cathode, electrolyte, and anode, respectively. We measured cyclic voltammetry on the thin-film battery and confirmed the charge and discharge peaks at around 4.2 V and 1.5 V, respectively. The initial area discharge capacity of the amorphous thin-film LIBs was 8.0 μAh/cm2 and 5.4 μAh/cm2 on glass and PI substrates, respectively.