多频电容电压表征系统

G. Nikolov, I. Ruskova, E. Gieva, B. Nikolova
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引用次数: 0

摘要

在不同直流电压水平、不同信号幅值和不同频率下的电容测量,在半导体和多层结构的检测中有着广泛的应用。一般来说,这种类型的仪器的成本是在几千美元的范围内,他们不是很受欢迎的市场。本文提出了将传统测量仪器与高级编程环境相结合的方法,以实现具有完整功能的电容测量系统。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
System for multi-frequency capacitance-voltage characterization
Capacitance measurement at different DC voltage levels, different signal amplitudes and different frequencies, finds extensive application to qualify semiconductor and multiple-layered structures. Generally, the cost of such type instrumentation is in range of several thousand dollars and they are not very popular in the market. In present paper an approach of combining conventional measuring instruments and high-level programming environment is suggested in order to achieve system with complete functionalities for capacitance measurements.
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