Surface replication with one-nanometer.level smoothness by a nickel electroforming process

A surface replication process is necessary for the mass production of nanometer-sized patterned and/or nanometer-flat surfaces. We have been developing a surface replication technique, aiming for 1 nanometer level replication accuracy in height direction. The process is based on nickel electroforming under low-temperature conditions. To investigate replication accuracy, we used an EEM (elastic emission machining) processed surface, having 0.1 nm flatness in root-mean-square (RMS) as a master surface, and compared the roughness of the master and replicated surfaces. The surface roughness is evaluated by using phase-shift microscopic interferometry and atomic force microscopy. The results indicate that surface replication is possible for one-nanometer–level smoothness. The durability of the master surface and repeatability of the process are also investigated. Surface quality of the master surface was found to be maintained during multiple electroforming processes.