H. Satoh, H. Suzuki, C. Takahashi, C. Narahara, Y. Ebata
{"title":"采用气隙式薄膜谐振器的400MHz单片振荡器","authors":"H. Satoh, H. Suzuki, C. Takahashi, C. Narahara, Y. Ebata","doi":"10.1109/ULTSYM.1987.198984","DOIUrl":null,"url":null,"abstract":"A preliminary study has been made on the fabrication technique and on the spurious response of a self-supported airgap type resonator on a SigN4 passivation film covering a Si substrate with the purpose ot bipolar monolithic oscillator application. A prototype 400MHz fully integrated one-chip oscillator consisting of a Colpitts-type circuit and the resonator is developed. The developed miniature oscillator is about lmm square in actual size. A typical performance is; 90dB for C/N (N: 20KHz offset from the carrier and 16KHz band width), 0- -5ppm/ .C for the 1st order temperature coefficient of frequency arid -0.029ppm/OC2 for the 2nd order temperature coefficient.","PeriodicalId":309261,"journal":{"name":"IEEE 1987 Ultrasonics Symposium","volume":"2011 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"19","resultStr":"{\"title\":\"A 400MHz One-Chip Oscillator Using an Air-Gap Type Thin Film Resonator\",\"authors\":\"H. Satoh, H. Suzuki, C. Takahashi, C. Narahara, Y. Ebata\",\"doi\":\"10.1109/ULTSYM.1987.198984\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"A preliminary study has been made on the fabrication technique and on the spurious response of a self-supported airgap type resonator on a SigN4 passivation film covering a Si substrate with the purpose ot bipolar monolithic oscillator application. A prototype 400MHz fully integrated one-chip oscillator consisting of a Colpitts-type circuit and the resonator is developed. The developed miniature oscillator is about lmm square in actual size. A typical performance is; 90dB for C/N (N: 20KHz offset from the carrier and 16KHz band width), 0- -5ppm/ .C for the 1st order temperature coefficient of frequency arid -0.029ppm/OC2 for the 2nd order temperature coefficient.\",\"PeriodicalId\":309261,\"journal\":{\"name\":\"IEEE 1987 Ultrasonics Symposium\",\"volume\":\"2011 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"1900-01-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"19\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"IEEE 1987 Ultrasonics Symposium\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/ULTSYM.1987.198984\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"IEEE 1987 Ultrasonics Symposium","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ULTSYM.1987.198984","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
A 400MHz One-Chip Oscillator Using an Air-Gap Type Thin Film Resonator
A preliminary study has been made on the fabrication technique and on the spurious response of a self-supported airgap type resonator on a SigN4 passivation film covering a Si substrate with the purpose ot bipolar monolithic oscillator application. A prototype 400MHz fully integrated one-chip oscillator consisting of a Colpitts-type circuit and the resonator is developed. The developed miniature oscillator is about lmm square in actual size. A typical performance is; 90dB for C/N (N: 20KHz offset from the carrier and 16KHz band width), 0- -5ppm/ .C for the 1st order temperature coefficient of frequency arid -0.029ppm/OC2 for the 2nd order temperature coefficient.
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