环氧树脂成型复合材料对模后热过程中扇形圆片级封装强度的影响

Cheng Xu, Z. Zhong, W. Choi
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引用次数: 9

摘要

扇出式晶圆级封装技术因其在微小尺寸内集成多种器件的灵活性而越来越受欢迎和吸引。小而薄的扇形晶圆级封装具有低封装强度和经常面临裂纹问题。在之前的研究中,当圆片上刻钝化层时,扇形圆片级封装强度显著提高。极薄的钝化层不应严重影响封装强度。因此,唯一的解释是在光刻过程中任何封装材料的强度发生了变化。本研究对环氧成型复合材料的热性能进行了评价,以了解环氧成型复合材料对包装强度和可靠性的影响。采用维氏硬度试验和三点弯曲试验对环氧成型复合材料的强度变化进行了评价。结果表明:模后固化工艺和任何模后热处理工艺对环氧树脂成型复合材料的强度有显著影响。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Epoxy molding compound effect on fan-out wafer level package strength during post-mold thermal process
Fan-out wafer level packaging technology becomes more and more popular and attractive of its flexibility for integration of diverse devices in a tiny form factor. The small and thin fan-out wafer level package has low package strength and often faces crack issues. In the previous study, the fan-out wafer level package strength increased significantly when the wafers were lithographed passivation layers. The extreme thin passivation layers should not impact the package strength seriously. Therefore, the only explanation was any package material strength changed during the lithographing process. In this study, the thermal properties of epoxy molding compound were evaluated to understand the effect of epoxy molding compound on the package strength and reliability. Both Vickers hardness test and three-point bending test were used to evaluate the changing of epoxy molding compound strength. The results showed that the post-mold curing process and any post-mold thermal process had a significant effect on the epoxy molding compound strength.
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