发布求助
文献互助 智能选刊 最新文献

甚高频器件用复杂异形硅结构制造工艺的发展

2008 18th International Crimean Conference - Microwave & Telecommunication Technology Pub Date : 2008-11-18 DOI:10.1109/CRMICO.2008.4676505
S. Timoshenkov, V. Kalugin, A. Klochko, I. Kalugina, E. P. Prokop’ev
{"title":"甚高频器件用复杂异形硅结构制造工艺的发展","authors":"S. Timoshenkov, V. Kalugin, A. Klochko, I. Kalugina, E. P. Prokop’ev","doi":"10.1109/CRMICO.2008.4676505","DOIUrl":null,"url":null,"abstract":"Results of study and development of technological processes of deep anisotropic etching of micromechanical elements (MME) of microelectromechanical systems (MEMS) for VHF devices are submitted.","PeriodicalId":328074,"journal":{"name":"2008 18th International Crimean Conference - Microwave & Telecommunication Technology","volume":"30 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2008-11-18","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Development of manufacture technological processes of complex profil silicon structures for VHF-devices\",\"authors\":\"S. Timoshenkov, V. Kalugin, A. Klochko, I. Kalugina, E. P. Prokop’ev\",\"doi\":\"10.1109/CRMICO.2008.4676505\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Results of study and development of technological processes of deep anisotropic etching of micromechanical elements (MME) of microelectromechanical systems (MEMS) for VHF devices are submitted.\",\"PeriodicalId\":328074,\"journal\":{\"name\":\"2008 18th International Crimean Conference - Microwave & Telecommunication Technology\",\"volume\":\"30 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2008-11-18\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2008 18th International Crimean Conference - Microwave & Telecommunication Technology\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/CRMICO.2008.4676505\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2008 18th International Crimean Conference - Microwave & Telecommunication Technology","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/CRMICO.2008.4676505","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0

摘要

介绍了用于甚高频器件的微机电系统(MEMS)微机械元件(MME)深度各向异性刻蚀工艺的研究与开发结果。
本文章由计算机程序翻译，如有差异，请以英文原文为准。
分享
查看原文 本刊更多论文
Development of manufacture technological processes of complex profil silicon structures for VHF-devices
Results of study and development of technological processes of deep anisotropic etching of micromechanical elements (MME) of microelectromechanical systems (MEMS) for VHF devices are submitted.
求助全文
通过发布文献求助，成功后即可免费获取论文全文。 去求助
来源期刊
2008 18th International Crimean Conference - Microwave & Telecommunication Technology
2008 18th International Crimean Conference - Microwave & Telecommunication Technology
自引率
0.00%
发文量
0
×
引用
GB/T 7714-2015
复制
MLA
复制
APA
复制
导出至
BibTeX EndNote RefMan NoteFirst NoteExpress
×
提示
您的信息不完整，为了账户安全，请先补充。
现在去补充
×
提示
您因"违规操作"
具体请查看互助需知
我知道了
×
提示
现在去查看 取消
×
提示
确定
请完成安全验证×
copy
已复制链接
快去分享给好友吧!
我知道了
右上角分享
点击右上角分享
0
联系我们：info@booksci.cn Book学术提供免费学术资源搜索服务，方便国内外学者检索中英文文献。致力于提供最便捷和优质的服务体验。 Copyright © 2023 布克学术 All rights reserved.
京ICP备2023020795号-1
ghs 京公网安备 11010802042870号
Book学术文献互助
Book学术文献互助群
群 号：604180095
Book学术官方微信