基于谐波分析的攻丝式AFM建模

Proceedings of the 1999 American Control Conference (Cat. No. 99CH36251) Pub Date : 1999-12-01 DOI:10.1109/ACC.1999.782775

A. Sebastian, M. Salapaka, D.J. Chen, J. Cleveland

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引用次数: 48

摘要

本文利用谐波平衡和平均技术分析了原子力显微镜(AFM)的攻丝模式动力学。建立了悬臂梁试样相互作用的模型。实验结果表明，该分析和模型能够预测出攻丝悬臂梁的性能。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Harmonic analysis based modeling of tapping-mode AFM

In this paper we use harmonic balance and averaging techniques to analyze the tapping mode dynamics of the atomic force microscope (AFM). A model for the cantilever sample interaction is developed. Experimental results show that the analysis and the model predict the behavior of the tapping cantilever.

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Proceedings of the 1999 American Control Conference (Cat. No. 99CH36251)

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