电迁移短长度效应的实际好处,包括一种新的设计规则方法和一个抗电迁移的电网,增强了可移植性

R. Wachnik, R. Filippi, T. Shaw, P. Lin
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引用次数: 15

摘要

一个简单的第一性原理模型可以准确地将电迁移过程中的电阻饱和与电流密度和条纹长度联系起来。在170-250/spl℃范围内,电阻饱和度与温度无关。上述观察结果允许开发一种新的设计规则方法。利用短长度效应可以设计出抗电迁移的电网。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Practical benefits of the electromigration short-length effect, including a new design rule methodology and an electromigration resistant power grid with enhanced wireability
A simple first principles model is shown to accurately relate resistance saturation during electromigration to the current density and stripe length. Resistance saturation is found to be independent of temperature in the range 170-250/spl deg/C. The above observations allow for the development of a new design rule methodology. An electromigration resistant power grid may be designed which takes advantage of the short-length effect.
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