Contactless in-situ probe planarity adjustment on co-planar devices

This paper demonstrates a contactless in-situ planarity adjustment of a ground-signal-ground (GSG) probe on practical planar devices. The proposed technique completes the adjustment with minimizing footprints on the devices. Furthermore, repeatability of tilt angle was 0.6 degrees, which was compatible to a conventional manual inspection technique. No footprint was observed after the adjustment process. The proposed technique can realize in-situ planarity adjustment just above a device-under-test (DUT).