Multiphysics Modeling and Characterization of MicroCVD Chip for Growing Carbon Nanomaterials

A multiphysics model of Micro-CVD chip for growing carbon nanotubes is presented in this paper. The proposed model covers structural, thermal and electric analyses and takes consideration of all modes of heat dissipation include heat convection, conduction and radiation. The temperature dependence of thermo physical properties and heat transfer properties are also taken into account. The method is proved to be general and can be used for the simulation and analysis of different type of electro-thermal Micro-CVD chip at different physical size over a wide range of operating temperature. Thus the thermal design of Micro-CVD chip for uniform temperature control, which is critical in synthesize carbon nanotubes, becomes possible. An improved distribution of micro-tubes on hot stage of Micro-CVD chip is designed and simulated. The temperature reaches 1300K and the variation on the whole reactive region of the hot stage is within ± 7K.