电极化对FinFET纳米晶体管热响应的影响

Haifa Bahri, F. Nasri, N. Jaba
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引用次数: 0

摘要

FinFET是MOSFET小型化的结果。由于这项技术,出现了热效应,这是我们关注的。值得注意的是,半导体材料中的声子输运是一个关键问题。然而,这种小型化包括几个问题,例如SCE短通道效应。奈米电晶体的挑战在于如何减少这些寄生效应,以提高逻辑门的开关速度。本文对栅极长度对finfet电热响应的影响进行了全面的研究。此外,本文还对20nm和10nm的FinFET器件进行了仿真。最后,用数值模拟的方法讨论了用于描述不同维度FinFET器件工作的电热模型。在本文中,我们通过COMSOL模拟研究了finfet的自热效应(SHE)特性。根据实验数据拟合$I_{D}-V_{D}$曲线进行标定。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Effects of the Electrical Polarizations on the Thermal Response of FinFET Nanotransistors
FinFET is the result of MOSFET miniaturization. Because of this technology, thermal effects have appeared, on which we have focused. Significantly, phonon transport in semiconductor materials is a crucial problem. However, this miniaturization includes several issues, such as SCE short-channel effects. The challenge for nanoscale transistors is to reduce these parasitic effects to increase the switching speed of a logic gate. This paper presents a comprehensive study of the gate length effects on the electrothermal response of FinFETs. In addition, the work shows the simulation of a 20 nm and 10 nm FinFET device. Finally, the paper discusses an electrothermal model utilized for describing the operation of FinFET devices in different dimensions using numerical simulation. In this paper, we present the investigation of self-heating effect (SHE) characteristics in FinFETs through the COMSOL simulation. The calibration is performed by fitting the $I_{D}-V_{D}$ curve based on the experimental data.
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