一个可生产的94ghz探测器电路,用于大规模视像应用

H. G. Henry, R. R. Shaller, R. Freitag, M. Cohn, W. Waters
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引用次数: 1

摘要

描述了一种94 GHz二极管探测器电路/天线元件,该元件采用全平面离子注入工艺制造的700 GHz fco GaAs肖特基二极管,具有高良率,均匀性和可重复性。这被开发为一个单一的“像素”,用于一个大型焦平面阵列,该阵列包含数千个这样的元素,这些元素是在许多大型GaAs芯片(“瓦片”)上制造的。实测94 GHz电流灵敏度为3-4 μA/μW, TSS为−50 dBm (BW=1MHz)。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
A producible 94 GHz detector circuit for large-scale vidicon applications
Described is a 94 GHz diode detector circuit/antenna element which employs a 700 GHz fco GaAs Schottky diode fabricated with a fully planar, ion implantation process for high yield, uniformity, and repeatability. This was developed as a single “pixel” for a large focal plane array containing thousands of such elements fabricated on a number of large GaAs chips (“tiles”). Measured 94 GHz current sensitivity was 3–4 μA/μW with TSS of −50 dBm (BW=1MHz).
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