产生稳定大气压非热等离子体的参数条件

X. Deng, M.G. Kong
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引用次数: 1

摘要

近年来,在大气压力下产生的非热等离子体在表面清洁和污染控制等方面得到了广泛的应用。一种等离子体生成配置由两个介质绝缘的平行板组成,施加几千伏和几千赫的交流电压。这种等离子体产生结构与许多高压绝缘系统和设备非常相似,因此它们在不断发展的等离子体和相关的等离子体结构相互作用方面有很多相似之处。在这篇贡献中,我们开发了一个一维数值模型来模拟由这种绝缘电极结构支持的放电等离子体,为了简单起见,我们考虑氦作为工作气体。假设流体力学近似适用,各种电离、激发和复合过程被认为是带电粒子和激发态的产生源。然后结合泊松方程求解玻尔兹曼方程。然后用数值例子探讨了诱导等离子体是非热的条件。还研究了等离子体对外加电压频率和环境气体压力的依赖关系。这些相关关系也适用于许多绝缘装置和系统。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Parametric conditions for generation of stable atmospheric pressure nonthermal plasmas
Nonthermal plasmas generated at atmospheric pressure have recently found many applications such as surface cleaning and pollution control. One plasma generation configuration consists of two dielectrically insulated parallel plates with application of an AC voltage of several kV and several kHz. Such a plasma generating structure is very similar to many HV insulating systems and equipment and as such they share much similarity in the evolving plasma and associated plasma-structure interaction. In this contribution, we develop a one-dimensional numerical model to simulate discharge plasmas supported by such an insulated electrode structure and for simplicity we consider helium as the working gas. Assuming that the hydrodynamic approximation applies, various ionization, excitation and recombination processes are considered as sources of generation of charged particles and excited species. Boltzmann equations are then solved in conjunction with the Poisson equation. Numerical examples are then used to explore the conditions under which the induced plasma is nonthermal. Also studied is the dependence of the plasma upon frequency of the applied voltage and the pressure of the ambient gas. These correlative relationships should also be true for many insulating devices and systems.
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